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Scaled, novel effective workfunction metal gate stacks for advanced Low-VT, gate-all-around vertically stacked nanosheet FETs with reduced vertical distance between sheets
Publication:
Scaled, novel effective workfunction metal gate stacks for advanced Low-VT, gate-all-around vertically stacked nanosheet FETs with reduced vertical distance between sheets
Date
2019
Proceedings Paper
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42260.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Veloso, Anabela
;
Simoen, Eddy
;
Oliveira, Alberto
;
Vaisman Chasin, Adrian
;
Chen, S.-C.
;
Lin, Y.
;
Miyashita, T.
;
Kim, M.
;
Jang, Doyoung
;
Ritzenthaler, Romain
;
Zhou, Daisy
;
Mertens, Hans
;
Pena, Vanessa
;
Santoro, Gaetano
;
Kenis, Karine
;
Sebaai, Farid
;
Mannaert, Geert
;
Devriendt, Katia
;
Hopf, Toby
;
Versluijs, Janko
;
Richard, Olivier
;
Machillot, Jerome
;
Yoshida, Naomi
;
Horiguchi, Naoto
Journal
Abstract
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2072
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations
Metrics
Views
2072
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations