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Scaled, novel effective workfunction metal gate stacks for advanced Low-VT, gate-all-around vertically stacked nanosheet FETs with reduced vertical distance between sheets

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2075 since deposited on 2021-10-27
Acq. date: 2026-01-08

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2075 since deposited on 2021-10-27
Acq. date: 2026-01-08

Citations