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Browsing by Author "Chen, Sheng Tse"

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    Publication

    Optimizing EUV OPC Runtime and Pattern Fidelity in DRAM Manufacturing Using Memory OPC Flow

    De Gong, Shu
    ;
    Chen, Sheng Tse
    ;
    Liao, Chun Cheng
    ;
    Huang, Teng Yen
    ;
    Meng, Renyang  
    ;
    Yang, Kiho  
    Proceedings paper
    2025, 2025 Conference on Novel Patterning Technologies, FEB 24-27, 2025

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