Publication:

Optimizing EUV OPC Runtime and Pattern Fidelity in DRAM Manufacturing Using Memory OPC Flow

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3051007
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Author(s)

De Gong, Shu
;
Chen, Sheng Tse
;
Liao, Chun Cheng
;
Huang, Teng Yen
;
Meng, Renyang  
;
Yang, Kiho  
;
Gillijns, Werner  
;
Lin, Hsin-jung
;
Ma, Shou-yuan
;
Tsai, JenHsiang
;
Lin, Ling Chieh
;
Chou, Ryan
;
Burbine, Andrew
;
Pearson, Alex
;
Zhang, Xima

Journal

Proceedings of SPIE

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45 since deposited on 2025-07-31
2last month
Acq. date: 2026-02-27

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45 since deposited on 2025-07-31
2last month
Acq. date: 2026-02-27

Citations