Browsing by Author "Chiou, T.-B."
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Publication Development of automatic OPC treatment and layout decomposition for double dipole lithography for low K1-imaging
Proceedings paper2005, Advanced Microlithographic Technologies, 8/11/2004, p.21-31Publication Line-end gap measurement with YieldStar scatterometer: towards an OPC model calibration
Proceedings paper2012, Metrology, Inspection, and Process Control for Microlithography XXVI, 12/02/2012, p.83242I