Browsing by Author "Chiou, T.B."

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Experimental verification of a model based decomposition method for double dipole lithography

Eurlings, M.
;
Hsu, S.D.
;
Hendrickx, Eric
;
op 't Root, W.
;
Laidig, T.L.
;
Chiou, T.B.
;
Chen, A.
;
Chen, F.
Proceedings paper
2004, Optical Microlithography XVII, 22/02/2004, p.1225-1236
The magnitude of potential exposure-tool-induced critical dimension and overlay errors in double dipole lithography for the 65-nm and 45-nm technology nodes

Chiou, T.B.
;
Chen, A.C.
;
Tseng, S.E.
;
Eurlings, M.
;
Hendrickx, Eric
;
Hsu, S.
Journal article
2004, Japanese Journal of Applied Physics. Part 1: Regular Papers, (43) 6B, p.3672-3679