Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Cho, Byung-Jin"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Development of a Hexagonal-Shaped Rapid Thermal Processor Using a Vertical Tube

    Cho, Byung-Jin
    ;
    Vandenabeele, Peter
    ;
    Maex, Karen  
    Journal article
    1994, IEEE Trans. Semiconductor Manufacturing, 7, p.345-353

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings