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Articles
Development of a Hexagonal-Shaped Rapid Thermal Processor Using a Vertical Tube
Publication:
Development of a Hexagonal-Shaped Rapid Thermal Processor Using a Vertical Tube
Date
1994
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Cho, Byung-Jin
;
Vandenabeele, Peter
;
Maex, Karen
Journal
IEEE Trans. Semiconductor Manufacturing
Abstract
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33305
since deposited on 2021-09-29
496
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
33305
since deposited on 2021-09-29
496
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations