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Articles
Development of a Hexagonal-Shaped Rapid Thermal Processor Using a Vertical Tube
Publication:
Development of a Hexagonal-Shaped Rapid Thermal Processor Using a Vertical Tube
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Date
1994
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Cho, Byung-Jin
;
Vandenabeele, Peter
;
Maex, Karen
Journal
IEEE Trans. Semiconductor Manufacturing
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33308
since deposited on 2021-09-29
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Acq. date: 2025-12-16
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Metrics
Views
33308
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-16
Citations