Publication:
Development of a Hexagonal-Shaped Rapid Thermal Processor Using a Vertical Tube
Date
| dc.contributor.author | Cho, Byung-Jin | |
| dc.contributor.author | Vandenabeele, Peter | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-09-29T12:40:07Z | |
| dc.date.available | 2021-09-29T12:40:07Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/76 | |
| dc.source.beginpage | 345 | |
| dc.source.endpage | 353 | |
| dc.source.journal | IEEE Trans. Semiconductor Manufacturing | |
| dc.source.volume | 7 | |
| dc.title | Development of a Hexagonal-Shaped Rapid Thermal Processor Using a Vertical Tube | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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