Browsing by Author "Cho, Sang-Joon"
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Publication Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.304-308Publication In-line atomic resolution local nanotopography variation metrology for CMP process
; ; ; Publication In-line critical dimension and sidewall roughness metrology study for compound nanostructure process control by in-line 3D atomic force microscopy
Meeting abstract2016, 230th ECS Meeting: Pacific Rim Meeting - PRiME, 2/10/2016, p.1950Publication In-line metrology for atomic resolution local height variation
Proceedings paper2017, 28th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 15/05/2017, p.267-272