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Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
Publication:
Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
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Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kim, Tae-Gon
;
Ryu, Heon-Yul
;
Kenis, Karine
;
Jo, Ah-jin
;
Cho, Sang-Joon
;
Park, Sang-il
;
Schmidt, Sebastian
;
Irmer, Bernd
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1949
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Acq. date: 2026-01-26
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Views
1949
since deposited on 2021-10-23
1
last month
1
last week
Acq. date: 2026-01-26
Citations