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Browsing by Author "Choi, In-Chan"

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    Development of post InGaAs CMP cleaning process for sub 10nm device application

    Purushothaman, Muthukrishnan
    ;
    Choi, In-Chan
    ;
    Kim, Hyun-Tae
    ;
    Teugels, Lieve  
    ;
    Kim, Tae-Gon
    Proceedings paper
    2017-10, International Conference on Planarization/CMP Technology - ICPT, 11/10/2017

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