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Browsing by Author "Choi, Sang-Jun"

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    ArF lithography options for 100-nm technologies

    Vandenberghe, Geert  
    ;
    Kim, Young-Chang
    ;
    Delvaux, Christie  
    ;
    Lucas, Kevin
    ;
    Choi, Sang-Jun
    Proceedings paper
    2001, Optical Microlithography XIV, 27/02/2001, p.179-190
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    Publication

    ArF lithography options for 100nm technologies

    Vandenberghe, Geert  
    ;
    Kim, Young-Chang
    ;
    Delvaux, Christie  
    ;
    Lucas, Kevin
    ;
    Choi, Sang-Jun
    Journal article
    2001, Semiconductor Fabtech, 14, p.157-165

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