Browsing by Author "Choi, Seung-Woo"

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Plasma enhanced atomic layer deposition of silicon oxide for through silicon via

Kwon, Hak-Yong
;
Kim, Jeon-Ho
;
Kim, Young-Hoon
;
Kim, Young-Jae
;
Kim, Dae-Youn
;
Choi, Seung-Woo
Proceedings paper
2010, 10th International Conference on Atomic Layer Deposition - ALD, 20/06/2010
Relationships between deposition parameters, step coverage, throughput, and electrical properties of PEALD SiO2 insulation liners for HVM TSV application

Jung, In Soo
;
Woo, Jeong-Jun
;
Kwon, Hak Yong
;
Kim, Young-Jae
;
Kang, Dong-Suk
;
Park, Ju-Hyuk
Meeting abstract
2011, 11th International Conference on Atomic Layer Deposition - ALD, 26/06/2011