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Browsing by Author "Choi, Soo Han"

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    SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node

    Lee, Jae Uk  
    ;
    Choi, Soo Han
    ;
    Yasser, Sherazi
    ;
    Kim, Ryan Ryoung Han  
    Meeting abstract
    2019, Design-Process-Technology Co-optimization for Manufacturability XIII, 24/02/2019, p.109620N

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