Browsing by Author "Christiano, V."
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Publication Hafnium aluminates deposited by atomic layer deposition: Structural characterization by X-ray spectroscopy
Proceedings paper2012, Proceedings of the 27th Symposium on Microelectronics Technology and Devices - SBMicro, 30/08/2012, p.383-390Publication Physical characterization of hafnium aluminates dielectrics deposited by atomic layer deposition
Journal article2015-09, Journal of Integrated Circuits and Systems, (10) 1, p.49-58