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Browsing by Author "Christiano, Verônica"

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    Physical characterization of high-k HfxAl1-xOy gate dielectrics prepared by ALD

    Christiano, Verônica
    ;
    Adelmann, Christoph  
    ;
    Kellermann, Guinther
    ;
    Verdonck, Patrick  
    Proceedings paper
    2011, 26th Symposium on Microelectronics Technology and Devices - SBMicro, 30/08/2011, p.393-400

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