Browsing by Author "Chung, Angeline"
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Publication Effective use of aerial image metrology for calibration of OPC models
;Chen, Ao ;Foong, Yee Mei ;Thaler, Thomas ;Buttgereit, Ute ;Chung, AngelineBurbine, AndrewProceedings paper2017, Optical Microlithography XXX, 26/02/2017, p.101470Y