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Browsing by Author "Chung, Seung-Min"

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    Effects of plasma surface treatment on the self-forming barrier process in porous SiOCH

    Chung, Seung-Min
    ;
    Koike, Junichi
    ;
    Tokei, Zsolt  
    Proceedings paper
    2008, Materials and Processes for Advanced Interconnects for Microelectronics, 24/03/2008, p.N03.10

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