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Effects of plasma surface treatment on the self-forming barrier process in porous SiOCH
Publication:
Effects of plasma surface treatment on the self-forming barrier process in porous SiOCH
Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chung, Seung-Min
;
Koike, Junichi
;
Tokei, Zsolt
Journal
Abstract
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1815
since deposited on 2021-10-17
Acq. date: 2025-10-26
Citations
Metrics
Views
1815
since deposited on 2021-10-17
Acq. date: 2025-10-26
Citations