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Conference contributions
Effects of plasma surface treatment on the self-forming barrier process in porous SiOCH
Publication:
Effects of plasma surface treatment on the self-forming barrier process in porous SiOCH
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chung, Seung-Min
;
Koike, Junichi
;
Tokei, Zsolt
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Views
1817
since deposited on 2021-10-17
2
last month
2
last week
Acq. date: 2026-01-10
Citations