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Browsing by Author "Clark, R"

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    Publication

    Ultralow resistive wrap around contact to scaled FinFET devices by using ALD-Ti contact metal

    Chew, Soon Aik
    ;
    Yu, Hao  
    ;
    Schaekers, Marc  
    ;
    Demuynck, Steven  
    ;
    Mannaert, Geert  
    ;
    Kunnen, Eddy
    Proceedings paper
    2017, IEEE International Interconnect Technology Conference - IITC, 16/05/2017, p.1-3

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