Browsing by Author "Clarysse, Marc"
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Publication Characterization and control of organic airborne contamination in lithographic processing
Proceedings paper2002, Metrology, Inspection, and Process Control for Microlithography XVI, 4/03/2002, p.1085-1109Publication New SPM concept for accurate and repeatable tip positioning
Journal article2009, Microelectronic Engineering, (86) 4_6, p.1234-1237