Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Cobb, J.L."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Line-edge roughness reduction and CD slimming using hardback processing

    Peters, R.D.
    ;
    Lucas, K.
    ;
    Cobb, J.L.
    ;
    Parker, C.
    ;
    Patterson, K.
    ;
    McCauley, R.
    ;
    Ercken, Monique  
    Proceedings paper
    2003, Metrology, Inspection, and Process Control for Microlithography XVII, 24/02/2003, p.1131-1142

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings