Browsing by Author "Collart, E. J. H."
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Publication Cluster formation during annealing of ultra-low-energy boron-implanted silicon
Publication Electrical characterization of ultra shallow dopant profiles
Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.76-88Publication Electrical characterization of ultrashallow dopant profiles
Journal article2000, Journal of the Electrochemical Society, (147) 9, p.3569-3574