Publication:

Cluster formation during annealing of ultra-low-energy boron-implanted silicon

Date

2000

Journal article

Simple item page Full metadata Statistics

Files

4187.pdf 272.76 KB

Author(s)

Collart, E. J. H.

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van den Berg, J. A.

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Goldberg, R. D.

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Clarysse, Trudo

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Vandervorst, Wilfried

Journal

J. Vacuum Science and Technology B

Statistics

1896 since deposited on 2021-10-14

Acq. date: 2026-02-24