Browsing by Author "Collart, E.J.H."
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Publication Advanced front-end processes for the 45nm CMOS technology node
Oral presentation2004, E-MRS Spring Meeting Symposium B: Materials Science Issues in Advanced CMOS Source-Drain EngineeringPublication Profile changes and self-sputtering during low energy ion implantation
Proceedings paper2002, Silicon Front-End Junction Formation Technologies, 1/04/2002, p.C7.2Publication Ultra-shallow junction process development for the 45nm CMOS technology node using co-implantation
Oral presentation2004, 15th International Conference on Ion Implantation Technology