Browsing by Author "Cong Que Dinh"
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Publication EUV resist performance enhancement by UV flood exposure for high NA EUV lithography
;Cong Que Dinh ;Nagahara, Seiji ;Yoshida, Keisuke ;Kondo, YoshihiroMuramatsu, MakotoProceedings paper2021, Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference, FEB 22-26, 2021, p.116120L