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Browsing by Author "Cong Que Dinh"

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    EUV resist performance enhancement by UV flood exposure for high NA EUV lithography

    Cong Que Dinh
    ;
    Nagahara, Seiji
    ;
    Yoshida, Keisuke
    ;
    Kondo, Yoshihiro
    ;
    Muramatsu, Makoto
    Proceedings paper
    2021, Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference, FEB 22-26, 2021, p.116120L

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