Browsing by Author "Conley, W."
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Publication Assessment of light source bandwidth impacts on image contrast enhancement using process window discovery
Proceedings paper2017, Optical Microlithography XXX, 25/02/2017, p.101471XPublication CD control using SiON BARL processing for sub-0.25μm lithography
Journal article1999, Microelectronic Engineering, (46) 1_4, p.51-54