Browsing by Author "Constantoudis, Vassilis"
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Publication Towards a complete description of line width roughness: a comparison of different methods for vertical and spatial LER and LWR analysis
;Constantoudis, Vassilis ;Patsis, George ;Leunissen, PeterGogolides, EvangelosProceedings paper2004, Metrology, Inspection, and Process Control for Microlithography XVIII, 22/02/2004, p.967-977