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Browsing by Author "Constantoudis, Vassilis"

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    Towards a complete description of line width roughness: a comparison of different methods for vertical and spatial LER and LWR analysis

    Constantoudis, Vassilis
    ;
    Patsis, George
    ;
    Leunissen, Peter
    ;
    Gogolides, Evangelos
    Proceedings paper
    2004, Metrology, Inspection, and Process Control for Microlithography XVIII, 22/02/2004, p.967-977

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