Publication:
Towards a complete description of line width roughness: a comparison of different methods for vertical and spatial LER and LWR analysis
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1881 since deposited on 2021-10-15
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Acq. date: 2026-10-08
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Statistics
Views
1881 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-10-08
Citations