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Browsing by Author "Cooke, M."

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    Plasma enhanced atomic layer etching of high-k layers on WS2

    de Marneffe, Jean-Francois  
    ;
    Marinov, D.
    ;
    Goodyear, A.
    ;
    Wyndaele, Pieter-Jan  
    Journal article
    2022, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (40) 4, p.042602

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