Browsing by Author "Cooper, E"
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Publication Strained germanium gate-all-around pMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
; ; ; ; ; Journal article2017, IEEE Transactions on Electron Devices, (64) 4, p.4587-4593Publication Strained germanium gate-all-around PMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
Proceedings paper2017-06, Symposium on VLSI Technology, 5/06/2017, p.194-195