Browsing by Author "Corliss, Daniel"
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Publication Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems
;Mulder, Melchior ;Engelen, Andre ;Noordman, Oscar ;Streutker, Gertvan Drieenhuizen, BertProceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.76401P