Publication:

Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems

Date

2010

Proceedings Paper

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Files

20396.pdf 3.32 MB

Author(s)

Mulder, Melchior

;

;

Noordman, Oscar

;

Streutker, Gert

;

van Drieenhuizen, Bert

;

van Nuenen, Cas

;

Endendijk, Wilfred

;

;

;

;

Kazinczi, Robert

;

;

;

Zimmermann, Joerg

;

Trauter, Bastian

;

;

;

Corliss, Daniel

;

Statistics

2033 since deposited on 2021-10-18

2last month

Acq. date: 2026-04-06