Publication:

Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems

Date

2010
Proceedings Paper
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dc.contributor.authorMulder, Melchior
dc.contributor.authorEngelen, Andre
dc.contributor.authorNoordman, Oscar
dc.contributor.authorStreutker, Gert
dc.contributor.authorvan Drieenhuizen, Bert
dc.contributor.authorvan Nuenen, Cas
dc.contributor.authorEndendijk, Wilfred
dc.contributor.authorVerbeeck, Jef
dc.contributor.authorBouman, Wim
dc.contributor.authorBouma, Anita
dc.contributor.authorKazinczi, Robert
dc.contributor.authorSocha, Robert
dc.contributor.authorJuergens, Dirk
dc.contributor.authorZimmermann, Joerg
dc.contributor.authorTrauter, Bastian
dc.contributor.authorBekaert, Joost
dc.contributor.authorLaenens, Bart
dc.contributor.authorCorliss, Daniel
dc.contributor.authorMcIntyre, Greg
dc.contributor.imecauthorBekaert, Joost
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.accessioned2021-10-18T19:20:40Z
dc.date.available2021-10-18T19:20:40Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17660
dc.source.beginpage76401P
dc.source.conferenceOptical Microlithography XXIII
dc.source.conferencedate21/02/2010
dc.source.conferencelocationSan Jose, CA USA
dc.title

Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems

dc.typeProceedings paper
dspace.entity.typePublication
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