Browsing by Author "Costantoudis, Vassilios"
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Publication Multifractal analysis of line-edge roughness
Proceedings paper2018, Metrologia, Inspection, and Process Control for Microlithography XXXII, 25/02/2018, p.1058534Publication Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization
Proceedings paper2018, Metrology, Inspection, and Process Control for Microlithography XXXII, 25/02/2018, p.105851K