Publication:

Multifractal analysis of line-edge roughness

Date

2018

Proceedings Paper

https://doi.org/10.1117/12.2306508

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Files

39772.pdf 3.61 MB

Author(s)

Costantoudis, Vassilios

;

Papaverios, George

;

;

Rutigliani, Vito

;

Van Roey, Frieda

;

Gogolides, Evangelos

Journal

Proceedings of SPIE

Metrics

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