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Multifractal analysis of line-edge roughness
Publication:
Multifractal analysis of line-edge roughness
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Date
2018
Proceedings Paper
https://doi.org/10.1117/12.2306508
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39772.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Costantoudis, Vassilios
;
Papaverios, George
;
Lorusso, Gian
;
Rutigliani, Vito
;
Van Roey, Frieda
;
Gogolides, Evangelos
Journal
Proceedings of SPIE
Abstract
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1980
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Acq. date: 2025-12-10
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Views
1980
since deposited on 2021-10-25
5
last month
2
last week
Acq. date: 2025-12-10
Citations