Browsing by Author "Cowern, Nick"
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Publication Gettering of transition metals by porous silicon in epitaxial silicon solar cells
Journal article2012, Physica Status Solidi A, (209) 10, p.1866-1871Publication Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions
Proceedings paper2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.135-140Publication Review of electrical characterization of ultra-shallow junctions with micro four-point probes
Publication Role of C and B clusters in transient diffusion of B in silicon
Journal article1996, Applied Physics Letters, (68) 8, p.1150-1152Publication Shallow junctions for sub-100 nm CMOS technology
Publication Ultrashallow junctions for advanced CMOS technology