Browsing by Author "Cristiano, F."
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Publication Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctions
Proceedings paper2004, Silicon Front-End Junction Formation - Physics and Technology, 12/04/2004, p.C3.6Publication Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions
Journal article2004, Applied Physics Letters, (84) 12, p.2055-2057