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Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions
Publication:
Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pawlak, Bartek
;
Surdeanu, Radu
;
Colombeau, B.
;
Smith, A.J.
;
Cowern, N.E.B.
;
Lindsay, Richard
;
Vandervorst, Wilfried
;
Brijs, Bert
;
Richard, Olivier
;
Cristiano, F.
Journal
Applied Physics Letters
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1950
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1950
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations