Publication:
Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions
Date
| dc.contributor.author | Pawlak, Bartek | |
| dc.contributor.author | Surdeanu, Radu | |
| dc.contributor.author | Colombeau, B. | |
| dc.contributor.author | Smith, A.J. | |
| dc.contributor.author | Cowern, N.E.B. | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Cristiano, F. | |
| dc.contributor.imecauthor | Pawlak, Bartek | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.date.accessioned | 2021-10-15T15:22:48Z | |
| dc.date.available | 2021-10-15T15:22:48Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9411 | |
| dc.source.beginpage | 2055 | |
| dc.source.endpage | 2057 | |
| dc.source.issue | 12 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 84 | |
| dc.title | Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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