Browsing by Author "Cross, A."
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Publication Assessment of light source bandwidth impacts on image contrast enhancement using process window discovery
Proceedings paper2017, Optical Microlithography XXX, 25/02/2017, p.101471XPublication Defect learning methodology applied to microbump process at 20μm pitch and below
Proceedings paper2018, 2018 29th Annual SemI Advanced Semiconductor Manufacturing Conference - ASMC, 30/04/2018, p.10-17Publication Massive metrology for process development and monitoring applications
Proceedings paper2020, Metrology, Inspection, and Process Control for Microlithography XXXIV, 23/03/2020, p.1132528Publication What's in space – Exploration and improvement of line/space defect inspection of fine-pitch redistribution layer for fan-out wafer level packaging
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