Browsing by Author "Cubaynes, F.N."

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Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETS

Kraus, P.A.
;
Chua, T.C.
;
Ahmed, K.Z.
;
Campbell, J.
;
Nouri, F.
;
Cruise, J.
;
Rothschild, Aude
Journal article
2004, Semiconductor Fabtech, 23, p.73-76
Plasma-nitrided silicon-rich oxide as an extension to ultrathin nitrided oxide gate dielectrics

Cubaynes, F.N.
;
Venezia, V.C.
;
van der marel, C.
;
Snijders, J.H.M.
;
Everaert, Jean-Luc
Journal article
2005, Applied Physics Letters, (86) 17, p.172903-1-172903-3