Browsing by Author "Curvers, Benoit"
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Publication 3D simulation for melt laser anneal integration in FinFET's contact
;Tabata, Toshiyuki ;Curvers, Benoit ;Huet, Karim ;Chew, Soon AikEveraert, Jean-LucJournal article2020, IEEE Journal of the Electron Devices Society, 8, p.1323-1327