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Browsing by Author "D'havé, Koen"

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    Publication

    Backside Power Delivery With Relaxed Overlay for Backside Patterning Using Extreme Wafer Thinning and Molybdenum-Filled Slit Nano Through Silicon Vias

    Zhao, Peng  
    ;
    Witters, Liesbeth  
    ;
    Jourdain, Anne  
    ;
    Stucchi, Michele  
    ;
    Jourdan, Nicolas  
    ;
    Maes, J. W.
    Journal article
    2024, IEEE TRANSACTIONS ON ELECTRON DEVICES, (71) 12, p.7963-7969

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