Browsing by Author "Daamen, Roel"

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Air-gap formation by UV-assisted decomposition of CVD material

Pantouvaki, Marianna
;
Humbert, Aurelie
;
Van Besien, Els
;
Camerotto, Elisabeth
Meeting abstract
2008, 17th Workshop Materials for Advanced Metallization, 2/03/2008
Air-gap formation by UV-assisted decomposition of CVD material

Pantouvaki, Marianna
;
Humbert, Aurelie
;
Van Besien, Els
;
Camerotto, Elisabeth
Journal article
2008, Microelectronic Engineering, (85) 10, p.2071-2074