Air-gap formation by UV-assisted decomposition of CVD material

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Author(s)

Pantouvaki, Marianna

;

Humbert, Aurelie

;

Van Besien, Els

;

Camerotto, Elisabeth

;

Travaly, Youssef

;

Richard, Olivier

;

Willegems, Myriam

;

;

Kellens, Kristof

;

;

Hoofman, Romano

;

Journal

Microelectronic Engineering

Metrics

1920 since deposited on 2021-10-17

1last month

Acq. date: 2025-12-08