Publication:

Air-gap formation by UV-assisted decomposition of CVD material

Date

2008
Journal article
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dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorHumbert, Aurelie
dc.contributor.authorVan Besien, Els
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorTravaly, Youssef
dc.contributor.authorRichard, Olivier
dc.contributor.authorWillegems, Myriam
dc.contributor.authorVolders, Henny
dc.contributor.authorKellens, Kristof
dc.contributor.authorDaamen, Roel
dc.contributor.authorHoofman, Romano
dc.contributor.authorBeyer, Gerald
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorHumbert, Aurelie
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorWillegems, Myriam
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorHoofman, Romano
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecHumbert, Aurelie::0000-0002-2538-8991
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecHoofman, Romano::0000-0001-8740-104X
dc.date.accessioned2021-10-17T09:35:21Z
dc.date.available2021-10-17T09:35:21Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14267
dc.source.beginpage2071
dc.source.endpage2074
dc.source.issue10
dc.source.journalMicroelectronic Engineering
dc.source.volume85
dc.title

Air-gap formation by UV-assisted decomposition of CVD material

dc.typeJournal article
dspace.entity.typePublication
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