Browsing by Author "Dachs, C.J.J."
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Publication Advanced PMOS device architecture for highly-doped ultra-shallow junctions
Journal article2004, Japanese J. of Appl. Phys. Part 1, (43) 4B, p.1778-1783Publication Integrating diffusionless anneals into advanced CMOS technologies
Proceedings paper2004, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 15/09/2004, p.180-181