Advanced PMOS device architecture for highly-doped ultra-shallow junctions

Surdeanu, Radu; Pawlak, Bartek; Lindsay, Richard; Van Dal, Mark; Doornbos, Gerben; Dachs, C.J.J.; Ponomarev, Youri; Loo, Josine; Cubaynes, Florence; Henson, Kirklen; Verheijen, M.A.; Kaiser, M.; Pagès, Xavier; Stolk, Peter; Jurczak, Gosia

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Advanced PMOS device architecture for highly-doped ultra-shallow junctions

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2004

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Japanese J. of Appl. Phys. Part 1

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Advanced PMOS device architecture for highly-doped ultra-shallow junctions

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