Advanced PMOS device architecture for highly-doped ultra-shallow junctions

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Author(s)

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Lindsay, Richard

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Doornbos, Gerben

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Ponomarev, Youri

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Cubaynes, Florence

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Henson, Kirklen

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Verheijen, M.A.

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Journal

Japanese J. of Appl. Phys. Part 1

Metrics

2048 since deposited on 2021-10-15

3last month

Acq. date: 2025-12-08