Browsing by Author "Darnon, Maxime"
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Publication Dielectric reliability of 50nm 1/2 pitch structures in Aurora® LK
Proceedings paper2008, 40th International Confernece on Solid STate Devices and Materials, 22/09/2008Publication Dielectric reliability of 50nm half pitch structures in Aurora® LK
Journal article2009, Japanese Journal of Applied Physics, (48) 4, p.04C018Publication Transient-assisted plasma etching (TAPE): Concept, mechanism, and prospects
Journal article2024, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (42) 3, p.Art. 033006